Dewetting of Co thin films obtained by atomic layer deposition due to the thermal reduction process

ALBURQUENQUE, DANIELA; BRACAMONTE, VICTORIA; DEL CANTO, MARCELA; PEREIRA, ALEJANDRO; ESCRIG, JUAN

MRS Communications

Cambridge University Press

Año: 2017 p. 1 - 1

2159-6859

obalt oxide thin films with different thicknesses were synthesized by atomic layer deposition. After a thermal reduction process, under a controlled atmosphere of hydrogen, it was possible to convert cobalt oxide to metallic cobalt. The different thicknesses were obtained considering from 500 to 2000 cycles of CoCp2/O3. The thin films were characterized by x-ray diffraction, scanning electron microscopy, energy dispersive x-ray microanalysis, and by magneto-optical Kerr effect measurements. The indirect synthesis process allows us to obtain cobalt oxide and cobalt thin films with controlled thicknesses and extraordinary magnetic properties, with coercivities above 500 Oe.