Ellipsometric Investigation of Thick Vertically Oriented MoS2Films Grown on Mo Foil at High Temperatures

NAVARRO-GAMARRA, KAREN E.; DE PAOLI, JUAN M.; PATRITO, EDUARDO M.

JOURNAL OF PHYSICAL CHEMISTRY C

AMER CHEMICAL SOC

Año: 2021 vol. 125 p. 2005 - 2005

1932-7447

hin films of MoS2 with vertically aligned layers have been less investigated than their horizontal counterparts although they find important applications in energy storage, catalysis, and solar energy harvesting. Many applications require precise control of the film thickness and homogeneity. In this context, spectroscopic ellipsometry is a powerful technique that allows precise determination of the film thickness and evaluation of the film homogeneity and crystallinity from the features of the dielectric function spectrum. Homogeneous films of MoS2 were grown by chemical vapor deposition by sulfurizing Mo foils in sulfur vapor at atmospheric pressure in the 800-1000°C temperature range. The surface topography obtained by scanning electron microscopy images was characterized by vertical structures with a platelet-like morphology. Fractured cross sections showed compact MoS2 films with uniform thickness and a columnar morphology compatible with a vertical orientation of the layers. The