Ellipsometric Study of WO3 Films Dissolution in Aqueous Solutions

M. A. PÉREZ AND M. LÓPEZ TEIJELO.

THIN SOLID FILMS

Año: 2004 vol. 448 p. 138 - 138

0040-6090

llipsometry is used as a monitoring technique to study the galvanostatic growth and the open circuit dissolution of WO3 films in different acid media.The optical properties of the oxide in the presence or the absence of the electric field across the film were obtained.It is shown that ellipsometry is a suitable technique for distinguishing among different phenomena like hydrationand generation of porosity andyor roughness occurring simultaneously with the decrease of thickness during dissolution.WO3 dissolution obeys a zero-order rate law with respect to the film thickness.