Production of silicon containing particles by laser induced reaction of silane with methane, ethane and acetylene

J.J. NA´ JERA, J.O. CA´ CERES, J.C. FERRERO, S.I. LANE

ELSEVIER SCI LTD

Año: 2002 vol. 22 p. 2371 - 2371

font face="AdvTimes" size="1"> Silicon containing ultrafine particles (Si and SiC) have been obtained by pulsed IR laser irradiation of gaseous SiH4/hydrocarbon (CH4, C2H6 and C2H